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常见的电子混合气体组分|纽瑞德特气

文章出处:责任编辑:作者:人气:-发表时间:2020-04-14 15:10:00【

 电子工业用气体统称为电子气。在大规模集成电路(LSI)、超大规模集成电路(VLSI)、半导体和电子器件生产与加工过程中,电子气主要用于气相外延生长、化学气相淀积、掺杂(杂质扩散)、蚀刻、离子注入、溅射、退火、系统加压、洁净吹扫、吸气覆盖、氧化和还原等工艺。其中部分气体直接作为半导体源,如硅源、硼源、磷源和CVD 源等等。

 
常见的几种电子混合气体
 
Oxygen in Tetrafluoromethane
 
4% O2/CF4
8% O2/CF4
17.5% O2/CF4
Standard Valve Outlet CGA580
Other DISS CGA connections are avaliable upon request.
Phosphine in Argon
 
1.0% PH3/Ar
2.0% PH3/Ar
5.0% PH3/Ar
10.0% PH3/Ar
15.0% PH3/Ar
Standard Valve Outlet CGA350
Manual and pneumatic DISS CGA connections are avaliable upon request.
Phosphine in Helium
 
1.0% PH3/He
2.0% PH3/He
10.0% PH3/He
Standard Valve Outlet CGA350
Manual and pneumatic DISS CGA connections are avaliable upon request.
Phosphine in Hydrogen
 
1.0% PH3/H2
5.0% PH3/H2
10.0% PH3/H2
15.0% PH3/H2
Standard Valve Outlet CGA350
Manual and pneumatic DISS CGA connections are avaliable upon request.
Phosphine in Nitrogen
 
1.0% PH3/N2
2.0% PH3/N2
3.0% PH3/N2
4.0% PH3/N2
5.0% PH3/N2
10.0% PH3/N2
15.0% PH3/N2
Standard Valve Outlet CGA350
Manual and pneumatic DISS CGA connections are avaliable upon request.
Silane in Argon
 
1.0% SiH4/Ar
2.0% SiH4/Ar
3.0% SiH4/Ar
4.0% SiH4/Ar
5.0% SiH4/Ar
10.0% SiH4/Ar
Standard Valve Outlet CGA350
Manual and pneumatic DISS CGA connections are avaliable upon request.
Silane in Hydrogen
 
1.0% SiH4/H2
2.0% SiH4/H2
3.0% SiH4/H2
4.0% SiH4/H2
5.0% SiH4/H2
10.0% SiH4/H2
Standard Valve Outlet CGA350
Manual and pneumatic DISS CGA connections are avaliable upon request.
Silane in Nitrogen
 
1.0% SiH4/N2
2.0% SiH4/N2
3.0% SiH4/N2
4.0% SiH4/H2
5.0% SiH4/N2
10.0% SiH4/N2
20.0% SiH4/N2
Standard Valve Outlet CGA350
Manual and pneumatic DISS CGA connections are avaliable upon request.
 
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此文关键字:特种气体知识 气体知识

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